Title:
A sheet for polishing pads, a manufacturing method for the same, a polishing pad, a manufacturing method for the same, and a grinding method
Document Type and Number:
Japanese Patent JP5917236
Kind Code:
B2
Inventors:
Fumio Miyazawa
Takahiro Kume
Shinji Okada
Takahiro Kume
Shinji Okada
Application Number:
JP2012082356A
Publication Date:
May 11, 2016
Filing Date:
March 30, 2012
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/24; B24B37/26; H01L21/304
Domestic Patent References:
| JP2011051074A | ||||
| JP2010234458A | ||||
| JP2004058450A1 | ||||
| JP2004358588A | ||||
| JP2011517111A | ||||
| JP2011224845A | ||||
| JP2005335028A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito