Title:
A sheet sticking device and a sticking method
Document Type and Number:
Japanese Patent JP6114585
Kind Code:
B2
Inventors:
Takeshi Takano
Application Number:
JP2013053476A
Publication Date:
April 12, 2017
Filing Date:
March 15, 2013
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683
Domestic Patent References:
| JP2007317758A | ||||
| JP60060800A | ||||
| JP6252263A | ||||
| JP10112494A | ||||
| JP3297135A |
Foreign References:
| US4671835 |
Attorney, Agent or Firm:
Intellectual Property Office