Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
A sheet sticking device and a sticking method
Document Type and Number:
Japanese Patent JP6251090
Kind Code:
B2
More Like This:
JP7090686Manufacturing method for film forming equipment and electronic devices
JP2009183997WORKPIECE SUPPORTER, AND WORKPIECE MACHINING METHOD USING THE SUPPORTER
JP2000286185SPIN CHUCK
Inventors:
Yoshiaki Sugishita
Application Number:
JP2014052165A
Publication Date:
December 20, 2017
Filing Date:
March 14, 2014
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683
Domestic Patent References:
JP2006245279A
JP2003520281A
JP2013139546A
JP2000109767A
JP7122329B2
JP2008172159A
Attorney, Agent or Firm:
Intellectual Property Office



 
Previous Patent: A manufacturing method of a forming object

Next Patent: FRONT LOADING DEVICE