The shutter disk with a fin for a substrate process chamber

Japanese Patent JP6250704

B2

Shutter disks for use in process chambers are provided herein. In some embodiments, a shutter disk for use in a process chamber may include a body having an outer perimeter, a top surface of the body, wherein the top surface includes a central portion having a substantially horizontal planar surface, and at least one angled structure disposed radially outward of the central portion, each of the at least one angled structure having a top portion and an angled surface disposed at a downward angle in a radially outward direction from the top portion toward the outer perimeter, and a bottom surface of the body.

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Cheer bonnie tea
Soo Sung-Moon
Tsai Chen-Shon Matthew
Dinsmore robert
Mori Glen Tea

JP2015553732A

December 20, 2017

December 17, 2013

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APPLIED MATERIALS,INCORPORATED

C23C14/34; C23C14/00; H01L21/02

JP10110267A
JP10088337A
JP2003027225A
JP62037369A
JP2005200682A

Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuhiko Suzuki

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