Title:
軸方向気体ベアリングを備えたサイドチャネル型ポンプ
Document Type and Number:
Japanese Patent JP2012527568
Kind Code:
A
Inventors:
Scofield Nigel Paul
Application Number:
JP2012511347A
Publication Date:
November 08, 2012
Filing Date:
May 18, 2010
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04D23/00; F04D29/057
Domestic Patent References:
| JP2008523417A | 2008-07-03 | |||
| JPS50133510A | 1975-10-22 | |||
| JP2008069681A | 2008-03-27 | |||
| JP2005320913A | 2005-11-17 | |||
| JPS50133510A | 1975-10-22 | |||
| JP2008069681A | 2008-03-27 | |||
| JP2005320913A | 2005-11-17 | |||
| JP2008523417A | 2008-07-03 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino