Title:
軸方向気体ベアリングを備えたサイドチャネル型ポンプ
Document Type and Number:
Japanese Patent JP5775513
Kind Code:
B2
Inventors:
Scofield Nigel Paul
Application Number:
JP2012511347A
Publication Date:
September 09, 2015
Filing Date:
May 18, 2010
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04D23/00; F04D29/057
Domestic Patent References:
| JP2008523417A | ||||
| JP50133510A | ||||
| JP2008069681A | ||||
| JP2005320913A |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino