Title:
A silicon carbide semiconductor device and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6074787
Kind Code:
B2
Inventors:
Atsuyuki Tanaka
Noriyuki Iwamuro
Shinsuke Harada
Noriyuki Iwamuro
Shinsuke Harada
Application Number:
JP2012120263A
Publication Date:
February 08, 2017
Filing Date:
May 25, 2012
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Fuji Electric Co., Ltd.
Fuji Electric Co., Ltd.
International Classes:
H01L29/78; H01L21/336; H01L29/12; H01L29/739
Domestic Patent References:
| JP2011258635A | ||||
| JP4239137A | ||||
| JP2009105177A | ||||
| JP2010087126A |
Foreign References:
| WO2004036655A1 |
Attorney, Agent or Firm:
Akinori Sakai