Title:
簡易ランプ設計
Document Type and Number:
Japanese Patent JP7242734
Kind Code:
B2
Abstract:
Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.
More Like This:
Inventors:
Lanish, Joseph M.
Application Number:
JP2021037359A
Publication Date:
March 20, 2023
Filing Date:
March 09, 2021
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01K1/38; H01K1/40; H01K1/66
Domestic Patent References:
| JP2008544461A | ||||
| JP2002008597A | ||||
| JP59069477U | ||||
| JP2109233A | ||||
| JP2001160378A |
Foreign References:
| US20030076026 | ||||
| US4570104 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation