Title:
【発明の名称】X線マスク及びX線露光方法
Document Type and Number:
Japanese Patent JP3042728
Kind Code:
B2
Inventors:
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Yo Somemura
Kazunori Miyoshi
Masato Matsuda
Yo Somemura
Kazunori Miyoshi
Masato Matsuda
Application Number:
JP14811991A
Publication Date:
May 22, 2000
Filing Date:
May 24, 1991
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
G03F1/22; H01L21/027; (IPC1-7): H01L21/027; G03F1/16
Domestic Patent References:
| JP62262428A |
Attorney, Agent or Firm:
Manabu Otsuka