Title:
ジアルキル亜鉛およびジアルキル亜鉛部分加水分解物含有溶液、並びにこれらの溶液を用いる酸化亜鉛薄膜の製造方法
Document Type and Number:
Japanese Patent JP7015112
Kind Code:
B2
Abstract:
The present invention pertains to: a solution that contains a diketone compound having an alkoxy group, dialkylzinc represented by general formula (1) and/or a partial hydrolysate of said dialkylzinc, and a solvent; and a method for producing a zinc oxide thin film in which a zinc oxide thin film is obtained by applying the dialkylzinc solution or solution containing a dialkylzinc partial hydrolysate to a base material. ZnR102 (1)In the formula, R10 is a C1-6 linear or branched alkyl group.The present invention provides a solution containing dialkylzinc or a dialkylzinc partial hydrolysate which can be handled in air and with which it is possible to form a transparent thin film having high adhesiveness to a substrate even with film formation in air, and a method for producing a zinc oxide thin film.
Inventors:
Koji Toyota
Kenichi Haga
Kenichi Haga
Application Number:
JP2017017300A
Publication Date:
February 15, 2022
Filing Date:
February 02, 2017
Export Citation:
Assignee:
Tosoh Finechem Co., Ltd.
International Classes:
C07C69/72; C01G9/02; C07C69/716; H01B1/20; H01B13/00
Domestic Patent References:
| JP2010254481A | ||||
| JP2016216292A | ||||
| JP11052600A | ||||
| JP2008013653A | ||||
| JP2011170979A | ||||
| JP2011168407A | ||||
| JP2012087019A | ||||
| JP2009120873A | ||||
| JP2008088511A | ||||
| JP2008120686A | ||||
| JP2012184192A | ||||
| JP2005350423A | ||||
| JP2006342960A | ||||
| JP7182939A |
Foreign References:
| WO2012120918A1 |
Other References:
European Journal of Inorganic Chemistry,2015年,pp. 3658-3665
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes