Title:
放射源
Document Type and Number:
Japanese Patent JP6498680
Kind Code:
B2
Abstract:
A faceted reflector (32, 32″) for receiving an incident radiation beam (2) and directing a reflected radiation beam at a target. The faceted reflector comprises a plurality of facets, each of the plurality of facets comprising a reflective surface. The reflective surfaces of each of a first subset of the plurality of facets define respective parts of a first continuous surface and are arranged to reflect respective first portions of the incident radiation beam in a first direction to provide a first portion of the reflected radiation beam. The reflective surfaces of each of a second subset of the plurality of facets define respective parts of a second continuous surface and are arranged to reflect respective second portions of the incident radiation beam in a second direction to provide a second portion of the reflected radiation beam.
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Inventors:
Eulings, Marcus, Franciscus, Antonius
Kleemanns, Neek, Antonius, Jacobs, Maria
Van Dizeldonk, Antonius, Johannes, Josephus
Hofstra, Ramon, Mark
Norman, Oscar, Franciscus, Josephus
Femme, Thien Nan
Van Schoat, Jean, Bernardo, Prehelms
Wang, Ji Eun-Chen
Tsang, Kevin, Weimin
Kleemanns, Neek, Antonius, Jacobs, Maria
Van Dizeldonk, Antonius, Johannes, Josephus
Hofstra, Ramon, Mark
Norman, Oscar, Franciscus, Josephus
Femme, Thien Nan
Van Schoat, Jean, Bernardo, Prehelms
Wang, Ji Eun-Chen
Tsang, Kevin, Weimin
Application Number:
JP2016546097A
Publication Date:
April 10, 2019
Filing Date:
December 19, 2014
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20; G02B19/00; H01S3/00; H01S3/10; H05G2/00
Domestic Patent References:
| JP2013251100A | ||||
| JP2005276673A | ||||
| JP9232694A |
Foreign References:
| WO2011122689A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki