Title:
放射源
Document Type and Number:
Japanese Patent JP7239491
Kind Code:
B2
Abstract:
A radiation source comprising a fuel emitter configured to provide droplets of fuel to a plasma formation region; and a laser system configured to supply a laser beam; wherein the laser system comprises a delay line configured to delay a primary portion of the laser beam relative to a subsidiary portion of the laser beam, such that a pulse of the laser beam subsidiary portion is incident at the plasma formation region before a pulse of the laser beam primary portion.
Inventors:
Van der Kerkhof, Marcus, Adrianus
Mulder, Heine, Mele
Mulder, Heine, Mele
Application Number:
JP2019561890A
Publication Date:
March 14, 2023
Filing Date:
May 03, 2018
Export Citation:
Assignee:
ASM L Netherlands B.V.
International Classes:
G03F7/20; G03F1/84; H05G2/00; H05H1/24
Domestic Patent References:
| JP2005017274A | ||||
| JP2011508965A | ||||
| JP2012146683A | ||||
| JP2013084971A | ||||
| JP2013546172A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
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