Title:
スピナー乾燥装置
Document Type and Number:
Japanese Patent JP7365160
Kind Code:
B2
Abstract:
Provided is a spinner dryer capable of reducing residual water on an adsorption surface by improving adsorption of a workpiece, shortening a drying process, and simplifying a device structure. A spinner dryer includes a rotary spinner table (10), a spinner table pad (11) disposed on the spinner table (10) and having an adsorption surface (12) for holding a workpiece, and a vacuum suction means for adsorbing the workpiece to the adsorption surface (12) while sucking a fluid from the adsorption surface (12). The adsorption surface (12) is provided with a suction port (15) connected to the vacuum suction means so that the fluid sucked by the vacuum suction means flows thereinto, and a suction groove (13) opened in a workpiece direction, and connected to the suction port (15) so that the fluid flows thereinto, and water component attached near the adsorption surface (12) of the workpiece is sucked and removed through the suction groove (13) and the suction port (15) in adsorbing the workpiece to the adsorption surface (12). Thus, a drying process with less residual water, can be efficiently executed in a short time.
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Inventors:
Satoru Ide
Kazuhiro Takaoka
Hiroshi Yamamoto
Kazuhiro Takaoka
Hiroshi Yamamoto
Application Number:
JP2019145366A
Publication Date:
October 19, 2023
Filing Date:
August 07, 2019
Export Citation:
Assignee:
Okamoto Machine Tool Co., Ltd.
International Classes:
F26B5/08; F26B11/18; H01L21/304; H01L21/683
Domestic Patent References:
| JP2004319930A | ||||
| JP59183735U |
Attorney, Agent or Firm:
Masahisa Ohtake