Title:
A split method of a circular board-shaped object
Document Type and Number:
Japanese Patent JP6084883
Kind Code:
B2
Inventors:
Shunichiro Hirosawa
Application Number:
JP2013080097A
Publication Date:
February 22, 2017
Filing Date:
April 08, 2013
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06
Domestic Patent References:
| JP2006156638A | ||||
| JP2004146487A |
Foreign References:
| WO2007060724A1 |
Attorney, Agent or Firm:
Suenari Mikio
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