Title:
The spray piping unit for etching devices
Document Type and Number:
Japanese Patent JP6180232
Kind Code:
B2
Inventors:
Aoki Tetsuya
Yukino Shinozaki
Akio Horiuchi
Yukino Shinozaki
Akio Horiuchi
Application Number:
JP2013172576A
Publication Date:
August 16, 2017
Filing Date:
August 22, 2013
Export Citation:
Assignee:
Jcu corporation
International Classes:
C23F1/08; B05B1/20; B05B3/12; H05K3/06
Domestic Patent References:
| JP2153081A | ||||
| JP7500877A | ||||
| JP58221282A |
Attorney, Agent or Firm:
Ono International Patent Office
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