Title:
Origin position detection method for sub-chuck table
Document Type and Number:
Japanese Patent JP6341695
Kind Code:
B2
Inventors:
Toshifumi Matsuyama
Application Number:
JP2014040057A
Publication Date:
June 13, 2018
Filing Date:
March 03, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B53/00; B24B27/06; B24B47/22; B24B49/12; H01L21/301
Domestic Patent References:
| JP2011258689A | ||||
| JP2013116545A |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi