Title:
A stocker provided with a purge function, and a stocker unit
Document Type and Number:
Japanese Patent JP6021046
Kind Code:
B2
Abstract:
A stocker is provided in which cells having a purge function and cells not having the purge function may coexist, and a cell not having the purge function may be easily changed to a cell that has the purge function. The stocker has a frame to which multiple cell supports not having a cleaning gas supplying nozzle are configured to be attached along the vertical direction or the horizontal direction, and the base of a stocker unit is attached to the frame. The stocker unit includes a pipe for supplying cleaning gas that is provided along the base, and multiple cell supports having the purge function that are attached to the base and are aligned along the vertical direction or the horizontal direction. Each cell support may support a container and includes a nozzle that supplies cleaning gas from the pipe to the container.
Inventors:
Murata Honest
Takashi Yamaji
Takashi Yamaji
Application Number:
JP2014531533A
Publication Date:
November 02, 2016
Filing Date:
June 21, 2013
Export Citation:
Assignee:
Murata Machinery Co., Ltd.
International Classes:
B65G1/14; B65G1/00; H01L21/673
Domestic Patent References:
| JP2008159734A | ||||
| JP2010182747A | ||||
| JP11168135A | ||||
| JP11314703A | ||||
| JP2000340641A | ||||
| JP2010241515A |
Foreign References:
| US20070237609 |
Attorney, Agent or Firm:
Akira Shioiri
Mika with salt
Mika with salt
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