A structure lighting microscope, the structure lighting method, and a program

Japanese Patent JP6197880

B2

A structured illumination microscope includes a spatial light modulator containing ferroelectric liquid crystals, an interference optical system for illuminating a specimen with an interference fringe generated by making lights from the spatial light modulator interfere with each other, a controller for applying a voltage pattern having a predetermined voltage value distribution to the ferroelectric liquid crystals, an image forming optical system for forming an image of the specimen, which has been irradiated with the interference fringe, an imaging element for generating an image by imaging the image formed by the image forming optical system, and a demodulating part for generating a demodulated image using a plurality of images, wherein the controller applies an image generation voltage pattern for generating the demodulated images and a burn-in prevention voltage pattern calculated based on the image generation voltage pattern to the ferroelectric liquid crystals.

JP6076042	Microscope and control method
WO/2022/220678	COMPACT OPTICAL MICROSCOPE, METROLOGY DEVICE COMPRISING THE OPTICAL MICROSCOPE AND A WAFER POSITIONING METROLOGY APPARATUS COMPRISING THE METROLOGY DEVICE
JP4334801	A pattern forming member applied to a sectioning image observing device and a sectioning image observing device using the pattern forming member.

Fumihiro Utaki
Ryosuke Komatsu
Yosuke Shimizu

JP2015552502A

September 20, 2017

December 11, 2014

Click for automatic bibliography generation  

NIKON CORPORATION

G02B21/00; G01N21/64; G02B21/06

JP2004001348A
JP2002072252A
JP2007072403A
JP2007213081A

WO2008132976A1
WO2013136356A1

Masatake Shiga
Tadashi Takahashi

Previous Patent: A manufacturing method of a lamination ceramic condenser and a lamination ceramic condenser

Next Patent: LASER OSCILLATION TUBE