Title:
工作物およびその加工方法
Document Type and Number:
Japanese Patent JP6383333
Kind Code:
B2
Abstract:
Vacuum coating system comprises a coating chamber, where a substrate holder, preferably double-rotatable or three-way rotating holder is arranged in the coating chamber. Cathodic arc sources are provided with two type targets, where the two type targets are made of aluminum and chromium having different ratio of aluminum or chromium.
Inventors:
Delflinger, Volker
Lighter, andreas
Guy, Christoph
Lighter, andreas
Guy, Christoph
Application Number:
JP2015145619A
Publication Date:
August 29, 2018
Filing Date:
July 23, 2015
Export Citation:
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON
International Classes:
B23C5/16; B23C5/10; B23D43/00; B23D77/00; B23F21/16; C23C14/00; C23C14/02; C23C14/06; C23C14/58; C23C28/04; C23C30/00; C23C14/34
Domestic Patent References:
| JP9041127A | ||||
| JP2002113604A | ||||
| JP2000144376A | ||||
| JP2004050381A | ||||
| JP2000144378A | ||||
| JP2000271699A |
Foreign References:
| US20020102400 |
Other References:
井手幸夫 外2名,反応性スパッタリング法によるAl-Cr-N系皮膜の作製,日本金属学会誌,日本,1999年,第63巻第12号,1576-1583
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Nobuo Arakawa
Masato Sasaki