Title:
SUBSTRATE CONTAINER
Document Type and Number:
Japanese Patent JP2023090726
Kind Code:
A
Abstract:
To provide a substrate container.SOLUTION: A substrate container comprises: a shell including a front opening and an interior space; a plate configured to be fixed to the shell; a connector including a threaded end having an inner diameter, the connector extending through the shell and the plate and secured via a nut at the threaded end; and a replaceable, field-serviceable inlet or outlet module including a check valve and a nozzle having an end with an outer diameter smaller than the inner diameter of the threaded end of the connector, where the end of the nozzle is located within the inner diameter of the threaded end of the connector.SELECTED DRAWING: Figure 1
Inventors:
SHAWN D EGGUM
SMITH MARK V
FULLER MATTHEW A
SMITH MARK V
FULLER MATTHEW A
Application Number:
JP2023061617A
Publication Date:
June 29, 2023
Filing Date:
April 05, 2023
Export Citation:
Assignee:
ENTEGRIS INC
International Classes:
H01L21/673
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda