基板加熱装置、基板加熱方法及び赤外線ヒータ

Title:

基板加熱装置、基板加熱方法及び赤外線ヒータ

Document Type and Number:

Japanese Patent JP6757629

Kind Code:

B2

Abstract:

Balance of a temperature distribution of an infrared heater is improved. According to an embodiment, a substrate heating device comprises: a pressure reducing unit for reducing pressure of the atmosphere of an accommodating space of a substrate onto which a solution is applied; and an infrared heater capable of heating the substrate by an infrared ray. The infrared heater comprises: a bending unit bent to form tubular shapes at multiple points and be outwardly convex; and a cover unit disposed to cover at least a portion of the bending unit from the outside.

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Inventors:

Shigeru Kato
Tsutomu Sabota
Kenichi Yamatani
Yoshiaki Masu

Application Number:

JP2016167793A

Publication Date:

September 23, 2020

Filing Date:

August 30, 2016

Export Citation:

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