Title:
A substrate processing device provided with a pressure measuring instrument and its pressure measuring instrument
Document Type and Number:
Japanese Patent JP5993312
Kind Code:
B2
Inventors:
Satoru Koike
Application Number:
JP2013005777A
Publication Date:
September 14, 2016
Filing Date:
January 16, 2013
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01L19/06; G01L9/00; G01L9/08; G01L9/12
Domestic Patent References:
| JP2000512388A | ||||
| JP2005520148A | ||||
| JP2008527386A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito