Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP6380887
Kind Code:
B2
Inventors:
Naohiko Yoshihara
Application Number:
JP2014056768A
Publication Date:
August 29, 2018
Filing Date:
March 19, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; F26B5/16; F26B9/06
Domestic Patent References:
| JP2006295194A | ||||
| JP2014011426A | ||||
| JP2010238782A | ||||
| JP2004214449A | ||||
| JP2009279476A | ||||
| JP2007234809A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Goromaru Masami
Mio Kawasaki
Goromaru Masami