the substrate processing device which carried out level appearance, carried out a device and level appearance and was provided with the device

Title:

the substrate processing device which carried out level appearance, carried out a device and level appearance and was provided with the device

Document Type and Number:

Japanese Patent JP6220205

Kind Code:

B2

Inventors:

Hiroyuki Shinozaki

Application Number:

JP2013197742A

Publication Date:

October 25, 2017

Filing Date:

September 25, 2013

Export Citation:

Assignee:

Ebara Corporation

International Classes:

H01L21/304; B24B37/00

Domestic Patent References:

Attorney, Agent or Firm:

Shinjiro Ono
Toru Miyamae
Yamazaki Kosaku
Yukio Kanegae
Koichi Kushida

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