Title:
基板処理装置及び基板処理方法
Document Type and Number:
Japanese Patent JP4180250
Kind Code:
B2
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Inventors:
Kiyohisa Tateyama
Taketora Shinoki
Taketora Shinoki
Application Number:
JP2001162642A
Publication Date:
November 12, 2008
Filing Date:
May 30, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F26B15/12; B05B1/00; B05D1/02; B05D3/00; F26B5/14; H01L21/027; H01L21/304; H01L21/306
Domestic Patent References:
| JP8288250A | ||||
| JP11264962A | ||||
| JP49135256A | ||||
| JP2002231684A |
Attorney, Agent or Firm:
Junichi Omori