Title:
基板処理装置及び基板処理方法
Document Type and Number:
Japanese Patent JP4433570
Kind Code:
B2
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Inventors:
Yousuke Yamaki
Toshiaki Oguchi
Nobuyuki Takahashi
Toshiaki Oguchi
Nobuyuki Takahashi
Application Number:
JP2000169643A
Publication Date:
March 17, 2010
Filing Date:
June 06, 2000
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
B08B3/04; H01L21/304
Domestic Patent References:
| JP10154689A | ||||
| JP2000082701A | ||||
| JP9053887A | ||||
| JP5013354A | ||||
| JP7135182A |
Attorney, Agent or Firm:
Iwata Today sentence
Sayori Seto
Sayori Seto