The substrate stowage container which controls invasion of dust etc.

Title:

The substrate stowage container which controls invasion of dust etc.

Document Type and Number:

Japanese Patent JP5989110

Kind Code:

B2

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Inventors:

Kanamori Yudai

Application Number:

JP2014521075A

Publication Date:

September 07, 2016

Filing Date:

June 15, 2012

Export Citation:

Assignee:

Miraial Co., Ltd.

International Classes:

H01L21/673; B65D85/86

Domestic Patent References:

Attorney, Agent or Firm:

Masayuki Masabayashi
Hayashi Ichiyoshi
Iwaike Mitsuru

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