Title:
A substrate treating method and a control device
Document Type and Number:
Japanese Patent JP6066847
Kind Code:
B2
Inventors:
Yuichi Takenaga
Katsuhiko Komori
Katsuhiko Komori
Application Number:
JP2013143956A
Publication Date:
January 25, 2017
Filing Date:
July 09, 2013
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/205; C23C16/04; H01L21/302; H01L21/31; H01L21/316
Domestic Patent References:
| JP2012004542A | ||||
| JP2012199306A | ||||
| JP2008218709A | ||||
| JP2008214719A | ||||
| JP2011035366A | ||||
| JP2010258105A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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