Title:
A substrate with a film-thickness-measurement function, and the film-thickness-measurement method of an insulating layer
Document Type and Number:
Japanese Patent JP6276658
Kind Code:
B2
Inventors:
Kyoutsuka Masahiro
Application Number:
JP2014141569A
Publication Date:
February 07, 2018
Filing Date:
July 09, 2014
Export Citation:
Assignee:
Shinko Electric Industry Co., Ltd.
International Classes:
G01B7/06; G01B15/02; H05K3/00; H05K3/46
Domestic Patent References:
| JP2007107976A | ||||
| JP2010510523A |
Attorney, Agent or Firm:
Keizo Okamoto