Title:
基板
Document Type and Number:
Japanese Patent JP5104830
Kind Code:
B2
Abstract:
The present invention provides a substrate formed at a low cost and having a controlled plate shape, an epitaxial layer provided substrate obtained by forming an epitaxial layer on the substrate, and methods for producing them. The method for producing the substrate according to the present invention includes an ingot growing step serving as a step of preparing an ingot formed of gallium nitride (GaN); and a slicing step serving as a step of obtaining a substrate formed of gallium nitride, by slicing the ingot. In the slicing step, the substrate thus obtained by the slicing has a main surface with an arithmetic mean roughness Ra of not less than 0.05 mum and not more than 1 mum on a line of 10 mm.
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Inventors:
Naoki Matsumoto
Application Number:
JP2009200206A
Publication Date:
December 19, 2012
Filing Date:
August 31, 2009
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/304; B24B27/06; B28D5/04; C23C16/34; C30B25/20; C30B29/38; H01L21/205
Domestic Patent References:
| JP2008028259A | ||||
| JP2003183100A | ||||
| JP2006190909A | ||||
| JP2005136167A | ||||
| JP2003041240A | ||||
| JP2008078474A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki