Title:
A supervisor control device of a floating board, and a method for it
Document Type and Number:
Japanese Patent JP6116559
Kind Code:
B2
Abstract:
Disclosed is a process tunnel (102) through which substrates (140) may be transported in a floating condition between two gas bearings (124, 134). To monitor the transport of the substrates through the process tunnel, the upper and lower walls (120, 130) of the tunnel are fitted with at least one substrate detection sensor (S1, . . . , S6) at a respective substrate detection sensor location, said substrate detection sensor being configured to generate a reference signal reflecting a presence of a substrate between said first and second walls near and/or at said substrate detection sensor location. Also provided is a monitoring and control unit (160) that is operably connected to the at least one substrate detection sensor (S1, . . . , S6), and that is configured to record said reference signal as a function of time and to process said reference signal.
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Inventors:
Fermont, Pascal Foster
Van Felsen, Wilhelms Heraldus
Kuznetsov, Ferradimir Ivanovich
Franemann, Ernst Hendrik Aurich
Ramirez, Troxler, Honzalo Felipe
Van Felsen, Wilhelms Heraldus
Kuznetsov, Ferradimir Ivanovich
Franemann, Ernst Hendrik Aurich
Ramirez, Troxler, Honzalo Felipe
Application Number:
JP2014520157A
Publication Date:
April 19, 2017
Filing Date:
July 13, 2012
Export Citation:
Assignee:
ASM International N.V.
International Classes:
H01L21/68; B65G51/03; C23C16/458; H01L21/31; H01L21/677
Domestic Patent References:
| JP2009071323A | ||||
| JP7228346A | ||||
| JP2002176091A | ||||
| JP7228342A | ||||
| JP53107275A |
Foreign References:
| WO2009142488A1 |
Attorney, Agent or Firm:
Patent Business Corporation Takewa International Patent Office