Title:
セラミックサセプターの支持構造
Document Type and Number:
Japanese Patent JP4518370
Kind Code:
B2
Abstract:
A support structure for supporting a ceramic susceptor in a chamber is provided. The support structure includes a supporting portion joined with a back face of the ceramic susceptor. The supporting portion includes an inner space that is separated from the atmosphere of the chamber. A cooling system is provided below the supporting portion 6. At least one thermal control portion is provided between the cooling system and the supporting portion for reducing thermal conduction from the susceptor to the cooling system.
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Inventors:
Kazuaki Yamaguchi
Yoshinobu Goto
Hideyoshi Tsuruta
Yoshinobu Goto
Hideyoshi Tsuruta
Application Number:
JP2003194791A
Publication Date:
August 04, 2010
Filing Date:
July 10, 2003
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L21/02; H05B3/06; F27B17/00; F27D5/00; H01L21/00; H01L21/683; H05B3/14; H05B3/74
Domestic Patent References:
| JP2002299432A | ||||
| JP2002190372A | ||||
| JP9213781A | ||||
| JP5094865A |
Attorney, Agent or Firm:
Masumi Hosoda
Juno Aoki
Juno Aoki