Title:
A surface defective detecting device and a surface defect detecting method
Document Type and Number:
Japanese Patent JP5992315
Kind Code:
B2
Inventors:
Tomomi Hori
Tsuyoshi Imagawa
Tadamichi Shiraishi
Tsuyoshi Imagawa
Tadamichi Shiraishi
Application Number:
JP2012275196A
Publication Date:
September 14, 2016
Filing Date:
December 18, 2012
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01B11/30
Domestic Patent References:
| JP2010091514A | ||||
| JP7063518A | ||||
| JP11160046A | ||||
| JP2009085786A | ||||
| JP2249905A | ||||
| JP2004003930A |
Foreign References:
| US20070096044 |
Attorney, Agent or Firm:
Keigo Murakami
Masuo Oiwa
Kenji Yoshizawa
Takenaka Ikuo
Masuo Oiwa
Kenji Yoshizawa
Takenaka Ikuo
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