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Title:
A surface treatment method of a glass substrate, and a regeneration method of a photomask
Document Type and Number:
Japanese Patent JP6210270
Kind Code:
B2
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Inventors:
Yohei Konishi
Yohei Taita
Application Number:
JP2013102408A
Publication Date:
October 11, 2017
Filing Date:
May 14, 2013
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
G03F1/82; C03C15/00
Domestic Patent References:
JP2004042709A1
JP2006176341A
JP2001206737A
JP2010168262A
JP2005289762A
JP2005247598A
JP55146928A
JP2007108536A
JP5249463A
JP2011227260A
JP2004037295A
Foreign References:
US6568995
US20050188724
Attorney, Agent or Firm:
Hiroshi Sano
Akio Ishii



 
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