Title:
基板内に構造を生成するためのシステム
Document Type and Number:
Japanese Patent JP6502325
Kind Code:
B2
Abstract:
The disclosure provides a system for producing structures in a substrate. The system includes a projection exposure system. The projection exposure system includes a projection optical unit and an illumination system.
Inventors:
Patra Michael
Application Number:
JP2016513362A
Publication Date:
April 17, 2019
Filing Date:
May 15, 2014
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G02B5/00; G03F7/20; G02B19/00
Domestic Patent References:
| JP2007287817A | ||||
| JP2003043661A | ||||
| JP2011520271A | ||||
| JP2006203192A | ||||
| JP2012049340A | ||||
| JP11354425A | ||||
| JP2007207821A | ||||
| JP2011197520A |
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Naoki Kondo
Hiroshi Oura
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Naoki Kondo
Hiroshi Oura