Title:
急速に焦点距離を変更する為のシステム及び方法
Document Type and Number:
Japanese Patent JP4405260
Kind Code:
B2
Abstract:
An apparatus and method for fast changing a focal length of a charged particle beam the method comprising the step of changing a control signal in response to a relationship between the control signal voltage value and the focal length of the charged particle beam.
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Inventors:
Shemesh, Droll
Shachar, Debi
Shachar, Debi
Application Number:
JP2003534949A
Publication Date:
January 27, 2010
Filing Date:
October 09, 2002
Export Citation:
Assignee:
Applied Materials Israel Limited
International Classes:
G06T17/00; H01J37/21; G06T17/20; H01J3/14; H01J3/26; H01J37/153; H01J37/22; H01J37/26
Domestic Patent References:
| JP7220668A | ||||
| JP2295042A | ||||
| JP2001084938A | ||||
| JP2001210263A | ||||
| JP2139845A | ||||
| JP1124946A | ||||
| JP2000077018A | ||||
| JP2001236915A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Ikeda adult
Masakazu Noda
Hiroto Kido
Masato Ikeda
Hideki Okita
Yuichi Yamada
Ikeda adult
Masakazu Noda
Hiroto Kido
Masato Ikeda
Hideki Okita