Title:
A system and a method for gas recovery and reuse
Document Type and Number:
Japanese Patent JP6224633
Kind Code:
B2
Abstract:
Process gas(es), such as but not limited to helium, can be used in the manufacture of a variety of objects. Described herein are methods to collect, reuse, and recycle the process gas(es) that are used in the production process rather than treat these materials as waste.
Inventors:
Christopher Michael Albright
Gregory Koslov Arslanian
Andrew David Johnson
David Charles Winchester
Gregory Koslov Arslanian
Andrew David Johnson
David Charles Winchester
Application Number:
JP2015002878A
Publication Date:
November 01, 2017
Filing Date:
January 09, 2015
Export Citation:
Assignee:
Vertham Materials US, Limited Liability Company
International Classes:
C01B23/00; B01D53/22; B01D53/46
Domestic Patent References:
| JP2012529367A | ||||
| JP6210157A | ||||
| JP2012124447A | ||||
| JP2001233607A | ||||
| JP2004536702A | ||||
| JP2005035884A | ||||
| JP10087339A | ||||
| JP2000072469A | ||||
| JP2115018A | ||||
| JP2009531163A | ||||
| JP2012501831A | ||||
| JP2007019052A |
Attorney, Agent or Firm:
Atsushi Aoki
Shinji Mitsuhashi
Kenji Kimura
Naori Kota
Tetsuji Koga
Shinji Mitsuhashi
Kenji Kimura
Naori Kota
Tetsuji Koga
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