Title:
A system and a method for the pressure sensor which has two-layer Di structure
Document Type and Number:
Japanese Patent JP6262017
Kind Code:
B2
Abstract:
Systems and methods for a pressure sensor are provided, where the pressure sensor comprises a housing having a high side input port that allows a high pressure media to enter a high side of the housing and a low side input port that allows a low pressure media to enter a low side of the housing when the housing is placed in an environment containing the high and low pressure media; a substrate mounted within the housing; a stress isolation member mounted to the substrate; a die stack having sensing circuitry bonded to the stress isolation member; a low side atomic layer deposition (ALD) applied to surfaces, of the substrate, the stress isolation member, and the die stack, exposed to the low side input port; and a high side ALD applied to surfaces, of the stress isolation member and the die stack, exposed to the high side input port.
Inventors:
Gregory Sea Brown
Application Number:
JP2014030620A
Publication Date:
January 17, 2018
Filing Date:
February 20, 2014
Export Citation:
Assignee:
Honeywell International Inc.
International Classes:
G01L9/00; G01L19/06; G01L13/02; G01L19/04
Domestic Patent References:
JP2686441B2 | ||||
JP3149544B2 | ||||
JP5142742B2 | ||||
JP5289321B2 | ||||
JP2898751B2 | ||||
JP3203560B2 |
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
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