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Patent Searching and Data


Title:
ポンプの弁シーケンスのためのシステムおよび方法
Document Type and Number:
Japanese Patent JP5253178
Kind Code:
B2
Abstract:
Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).

Inventors:
Gonera, george
James Cedron
Gashguy, Iraj
Magoon, Paul
Application Number:
JP2008543342A
Publication Date:
July 31, 2013
Filing Date:
November 20, 2006
Export Citation:
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Assignee:
Entegris Incorporated
International Classes:
F04B13/00; F04B43/02; F04B49/06; H01L21/027
Domestic Patent References:
JP10311824A
JP8504916A
Foreign References:
US20050184087
US20050126985
US5772899
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro