A system for compensating the dynamic deformation error and thermal deformation error of the gantry type XY linear motion stage in real time, a stage device, and a system equipped with this stage device.

Japanese Patent JP6343549

B2

Disclosed are a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring and inspecting apparatuses using the system. The system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially moving gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially moving slider moving on the X-axially moving gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially moving gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and thermal deformity errors based on the data received from the first and the second two-dimensional position measuring unit (FIG. 1).

JPS586556	HEAD POSITIONING CIRCUIT
JPH10161749	MOTOR STOPPING POSITION CONTROLLER AND ITS METHOD

Ko Byung Kwon
Banik Raul
Seo Jong Kyu
Shin Soo Gun
Jeong Chul
Kwon Young Wook

JP2014227950A

June 13, 2018

November 10, 2014

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Sunghan Engineering Corporation

G05D3/12; G01B21/00; G03F7/20; H01L21/027; H01L21/68

JP2011516822A
JP2001022448A
JP2008117968A
JP2008059016A

US20100066298
US20040178327
US20110061441
US20120105866

Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Kiyota Eisho

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