Title:
インプリント・リソグラフィ・プロセスにおける倍率拡大及びゆがみを補正するためのシステム
Document Type and Number:
Japanese Patent JP4594305
Kind Code:
B2
Abstract:
The present invention is directed toward a system to vary dimensions of a template in order to attenuate if not prevent distortions in an underlying pattern formed by the template. To that end, the system features a compression device that includes a pair of spaced-apart contact members to compress a perimeter surface of the template between the pair of spaced-apart contact members. The compression device includes first and second bodies, each has a contact member and an actuator arm. One of the actuator arms is coupled to the first body to reciprocate about an axis in response to variations of a volume of a bladder disposed adjacent to the actuator arm. In this manner, the distance between the two contact members may be varied.
Inventors:
Choi, Byung-jin
Sligny Vassan, Citrgata Vui
Mario Jay, Meissle
Sligny Vassan, Citrgata Vui
Mario Jay, Meissle
Application Number:
JP2006518977A
Publication Date:
December 08, 2010
Filing Date:
July 08, 2004
Export Citation:
Assignee:
Molecular Imprints Incorporated
International Classes:
H01L21/027; G01L21/30; G03F7/00; G03F
Foreign References:
| US20030081193 | ||||
| WO2002067055A1 | ||||
| WO2000062993A1 | ||||
| US5820894 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa