Title:
レーザ励起光源においてポンプ（励起）光と集光光とを分離するためのシステム
Document Type and Number:
Japanese Patent JP6724182
Kind Code:
B2
Abstract:
A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.
Inventors:
Shemerinin Anatoly
Bezel Ilya
Panther matthew
Sifrin Eugene
Bezel Ilya
Panther matthew
Sifrin Eugene
Application Number:
JP2019017951A
Publication Date:
July 15, 2020
Filing Date:
February 04, 2019
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01J65/04; G02B5/04; G02B6/42; G02B21/06; H05H1/24
Domestic Patent References:
| JP2003518272A | ||||
| JP2002014256A | ||||
| JP2013519211A | ||||
| JP2010170994A | ||||
| JP2002529769A |
Foreign References:
| US20130169140 | ||||
| US7705331 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office