Title:
【発明の名称】処理区域を流れる流体を制御するシステム
Document Type and Number:
Japanese Patent JP3400802
Kind Code:
B2
Abstract:
A regulator for maintaining a constant partial vacuum in a region includes a path, through which fluid passes from the region to a vacuum source, and a piston (2) movably mounted at a constriction point (30). The piston has a frontal face (15), exposed to fluid in the path upstream of the constriction point (30). A piston distal face (16), exposed to a reference pressure, such as the pressure of region and piston weight tends to widen the path at the constriction point (30). A force is exerted on the piston by a spring (21) under compression, in a direction that tends to narrow the path at the constriction point. A buffering gas, introduced to the area between the piston's skirt (29) and the piston mounting structure (65), may be used to keep fumes from backing up into the region and/or to provide a bearing.
Inventors:
Palmer, David W
Application Number:
JP51132694A
Publication Date:
April 28, 2003
Filing Date:
October 22, 1993
Export Citation:
Assignee:
Palmer, David W
International Classes:
F15B1/00; B01D53/26; B01L1/00; B08B15/02; F24F3/16; F24F7/06; F24F11/02; F24F11/75; F24F13/10; F24F13/12; F24F13/14; G05D7/01; G05D7/06; G05D16/10; G05D16/20; (IPC1-7): F24F7/06; B01D53/26; B01L1/00; G05D7/06
Other References:
【文献】米国特許5000221(US,A)
Attorney, Agent or Firm:
Kozo Yamazaki