Title:
テーブル
Document Type and Number:
Japanese Patent JP7204380
Kind Code:
B2
Abstract:
A table for heating or cooling a workpiece includes a plate member having a mounting surface for mounting the workpiece and a temperature control unit heating or cooling the plate member. A paint layer is formed on the mounting surface of the plate member, in which when the plate member is not heated or cooled by the temperature control unit and accordingly has a first temperature, the paint layer exhibits a first color, and when the temperature of the plate member is changed by the temperature control unit and the temperature of the mounting surface accordingly becomes a second temperature different from the first temperature, the color of the paint layer is changed to a second color different from the first color.
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Inventors:
Yoshinobu Saito
Application Number:
JP2018159258A
Publication Date:
January 16, 2023
Filing Date:
August 28, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/683
Domestic Patent References:
| JP2006339637A | ||||
| JP2010016363A | ||||
| JP2000183137A | ||||
| JP2002146242A | ||||
| JP2013092358A |
Attorney, Agent or Firm:
Patent Attorney Corporation Tokyo Alpa Patent Office
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