Title:
円筒形スパッタリングターゲット用ターゲット材および円筒形スパッタリングターゲット
Document Type and Number:
Japanese Patent JP6496681
Kind Code:
B2
Inventors:
Shintaro Ishida
Application Number:
JP2016099803A
Publication Date:
April 03, 2019
Filing Date:
May 18, 2016
Export Citation:
Assignee:
Mitsui Mining & Smelting Co., Ltd.
International Classes:
C23C14/34; B24B5/12; B24B5/50; B24B41/06
Domestic Patent References:
| JP10182151A | ||||
| JP2009221589A | ||||
| JP61284370A | ||||
| JP2009030165A | ||||
| JP2001131737A |
Foreign References:
| WO2010070832A1 |
Attorney, Agent or Firm:
Sakai International Patent Office