Title:
温調システム
Document Type and Number:
Japanese Patent JP7112915
Kind Code:
B2
Abstract:
A heat exchange unit performs heat exchange using a coolant and is disposed inside a placing table and equipped with heat exchange chambers. The heat exchange chambers are disposed in regions, respectively, set on the placing table. The regions are set along a placing surface of the placing table. A chiller device circulates the coolant with respect to the heat exchange chambers. A temperature detection device includes temperature detectors. The temperature detectors are disposed in the regions, respectively, between the respective heat exchange chambers and the placing surface. A control device controls the chiller device to adjust a pressure of the coolant such that a temperature of the placing table reaches a first temperature range, and controls the chiller device to individually adjust flow rates of the coolant supplied to the heat exchange chambers, respectively, such that all of temperatures measured by the temperature detectors reach the first temperature range.
Inventors:
Shin Yamaguchi
Akiyoshi Mitsumori
Akiyoshi Mitsumori
Application Number:
JP2018167847A
Publication Date:
August 04, 2022
Filing Date:
September 07, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; H01L21/683
Domestic Patent References:
| JP2018125461A | ||||
| JP2012069809A | ||||
| JP2008509553A | ||||
| JP2014011214A | ||||
| JP2011119515A | ||||
| JP2016012593A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashiwaoka
Yoshiki Kuroki
Junji Kashiwaoka