Title:
A temperature measuring method of a processing unit and a work
Document Type and Number:
Japanese Patent JP6057812
Kind Code:
B2
Abstract:
Provided are a processing apparatus (1) and a method capable of accurately measuring a real temperature of a workpiece contained and heated in a chamber. The processing apparatus (1) comprises a chamber (2) containing a workpiece (W), a measurement piece (6) installed in the chamber (2), and a measuring unit (8). The measurement piece (6) is capable of thermal expansion and contraction in response to an internal temperature of the chamber (2). The measuring unit (8) measures a thermal expansion and contraction amount of the measurement piece (6) to thereby measure the real temperature of the workpiece (W).
Inventors:
Hirofumi Fujii
Application Number:
JP2013076947A
Publication Date:
January 11, 2017
Filing Date:
April 02, 2013
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C23C14/52; C23C16/44; C23C16/52; G01K5/50
Domestic Patent References:
| JP63075795U | ||||
| JP2010151743A | ||||
| JP11202700A | ||||
| JP6058814A | ||||
| JP2000206070A | ||||
| JP57197432A | ||||
| JP7505744A | ||||
| JP7027634A | ||||
| JP2009212199A |
Attorney, Agent or Firm:
Toshio Yasuda
Mikio Yasuda
Mikio Yasuda