Title:
A temperature sensor and an electrooptics device
Document Type and Number:
Japanese Patent JP5916030
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a temperature sensor which achieves highly-reliable measurement.SOLUTION: A temperature sensor includes a measurement cell measuring temperature, and the measurement cell includes a ring oscillator in which an odd number of inverters are circularly connected. Each of the inverters includes a first conductivity type thin film transistor and a load element. The first conductivity type thin film transistor has lightly doped drain structure or offset structure. A transmission frequency of the ring oscillator strongly depends on the temperature, so that temperature measurement can be performed with high accuracy.
More Like This:
Inventors:
Hiroshima
Mitsutoshi Miyasaka
Mutsumi Kimura
Akihiro Nakajima
Jun Taya
Mitsutoshi Miyasaka
Mutsumi Kimura
Akihiro Nakajima
Jun Taya
Application Number:
JP2012029175A
Publication Date:
May 11, 2016
Filing Date:
February 14, 2012
Export Citation:
Assignee:
Seiko Epson Corporation
Ryukoku University
Ryukoku University
International Classes:
G01K3/14; G01K7/01; H01L21/336; H01L29/786
Domestic Patent References:
| JP2007171046A | ||||
| JP2008035498A | ||||
| JP2000009547A |
Attorney, Agent or Firm:
Akira Obayashi
Seiichi Takada
Taro Takahashi
Masahiko Ueyanagi
Osamu Suzawa
Seiichi Takada
Taro Takahashi
Masahiko Ueyanagi
Osamu Suzawa