Title:
温度センサ及び熱処理装置
Document Type and Number:
Japanese Patent JP5644007
Kind Code:
B2
Abstract:
A temperature detecting element is fixed reliably at an accurate position to enable improvement in a rising characteristic of a temperature and high-accuracy temperature control. Provided is a temperature sensor including a temperature detecting element detecting a temperature in a branch tube branched from a main tube and a positioning supporting mechanism positioning and supporting the temperature detecting element. Tension is applied to a cord of the temperature detecting element. The positioning supporting mechanism is supported by the tensioned cord to position and support the temperature detecting element. The positioning supporting mechanism includes a supporting tube supporting the temperature detecting element, a positioning member supporting the supporting tube and fixed at a set position, and a tensioner applying tension to the cord of the temperature detecting element.
Inventors:
斎藤 孝規
吉井 弘治
栗原 努
岡村 智弥
吉井 弘治
栗原 努
岡村 智弥
Application Number:
JP2012027629A
Publication Date:
December 24, 2014
Filing Date:
February 10, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
日本フェンオール株式会社
日本フェンオール株式会社
International Classes:
G01K1/08; F27B17/00; F27D21/00
Attorney, Agent or Firm:
Noriyuki Kudo
Yusuke Wakabayashi
Yusuke Wakabayashi