Title:
A template matching alignment method and a charged particle beam device
Document Type and Number:
Japanese Patent JP5971746
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To eliminate a matching error and perform alignment with excellent accuracy.SOLUTION: A control computer of a charged particle beam device: registers a plurality of templates (S10); separately performs matching processing of the registered templates on an observation image (S13); calculates a representative coordinate difference vector indicating a difference between a positional coordinate on the observation image of the template when the matching is successful and a positional coordinate on design, and a matching record value (S14); groups the calculated representative coordinate difference vector on the basis of the size and direction (S16); selects a group with the largest number of the representative coordinate difference vectors which belong to the group (S17); selects the template with the highest matching record value among the templates which belong to the selected group (S18); and associates the positional coordinate at the time of observation with the positional coordinate on design using the representative coordinate difference vector calculated with respect to the selected template (S19).
Inventors:
Akihiro Onisawa
Hojo Minoru
Toshikazu Kawahara
Hojo Minoru
Toshikazu Kawahara
Application Number:
JP2012053701A
Publication Date:
August 17, 2016
Filing Date:
March 09, 2012
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/22; H01J37/28; H01L21/66
Domestic Patent References:
| JP2012014475A | ||||
| JP10023322A | ||||
| JP2006066478A |
Attorney, Agent or Firm:
Isono Dozo
Etsuo Tada
Etsuo Tada